AMAT 0190-27355 Low Temperature Pump

Product Manual：

1. Basic Information
Manufacturer: CTI Kryogenics (AMAT certified original factory)
AMAT part number: 0190-27355
Internal model: On Board P300, module number 8113192G001
Compatible equipment: AMAT 300mm PVD system (such as Endura platform)
Purpose: Obtaining and maintaining high vacuum in the cavity (deposition/etching process)
Weight: Approximately 28 kg
2. Core specifications
Refrigeration principle: G-M closed cycle refrigeration (helium compression expansion)
Cold head temperature: Level 1~50K (-223 ℃); Level 2~4.2K (-269 ℃)

Extreme vacuum: up to 10 ⁻⁸~10 ⁻¹⁰ Pa
Extraction capability: High extraction speed for water vapor, nitrogen, and argon; Secondary cold head adsorption of H ₂/He/Ne
Power supply: Equipped with CTI compressor (such as 8128909G001R), three-phase 208VAC
Cooling method: Water cooling (standard)/Air cooling (optional)
3. Key functions
Ultra high vacuum generation: low-temperature condensation+activated carbon adsorption, quickly establishing and maintaining process vacuum
Clean chamber: effectively captures water, hydrocarbons, and residual gases, reducing particles and pollution
Stable pumping speed: 24/7 continuous operation, suitable for semiconductor production rhythm
Integrated design: On Board, directly installed on the side of the cavity to save space
Self protection: automatic shutdown alarm for overheating, overpressure, helium leakage, and abnormal water flow

Product detailed pictures：

0190-27355

product video

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