MKS 651D-15414 Pressure Controller

Product Manual：

MKS 651D-15414 Pressure Controller
beginning
MKS 651D-15414 is a pressure controller specifically designed for semiconductor vacuum equipment, used to accurately regulate chamber pressure and stabilize various coating and etching process environments.
Product Features
PID intelligent regulation, high pressure control accuracy
Equipped with automatic parameter adjustment function, quickly stabilize pressure values
LCD screen displays pressure and valve status intuitively
Supports both local and remote control operation modes
Multi channel standard communication interface for easy integration with industrial control systems
Can preset five sets of process parameters, easy to switch and use
Equipped with pressure abnormal alarm relay to promptly prompt faults

Soft start control design reduces airflow impact interference
Metal frame structure, dust-proof and anti-interference, suitable for clean workshops
Equipped with remote sensor zeroing function, easy calibration
Wide voltage adaptation, capable of stable adaptation to industrial power supply environments
Modular rack mounted installation, saving time and effort in disassembly and replacement
Built in overvoltage and overcurrent protection to reduce the probability of hardware damage
Multiple types of measurement units to choose from, suitable for different working conditions
Compatible with multiple MKS vacuum valves, with strong equipment versatility
summary
The MKS 651D-15414 pressure controller has stable regulation, convenient operation, and good compatibility, which can accurately maintain the pressure in the vacuum chamber and ensure stable production of semiconductor processes.

Product detailed pictures：

651D-15414

product video

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