LAM 02-425998-00 Robot Controller
Product Manual：
NOVELLUS 02-425998-00 Robot Controller Product Features
NOVELLUS 02-425998-00 is compatible with NOVELLUS deposition equipment and specializes in controlling wafer robotic arm transfer operations. It has strong adaptability to clean production lines and the following characteristics:
Customized motion control chip for continuous and uninterrupted operation, less prone to malfunctions
Multi axis linkage operation, coordinating the lifting and rotating actions of the robotic arm
Signal isolation protection, eliminating internal current interference of equipment
Accurate positioning control to prevent wear and tear on thin wafers
Onboard large capacity memory for fast processing of motion control instructions
Special equipment communication interface, interoperable with cavity control unit
Built in overload protection, the motor automatically stops running in case of abnormal operation
Modular split structure, saving time and effort in disassembly and maintenance
High and low temperature resistant components, adaptable to temperature changes inside the cabinet
Built in diagnostic program, one click detection of circuit and driver faults
Flexible speed adjustment, smooth start stop without shaking
Energy saving circuit design, controllable temperature rise during long-term operation
The program version can be refreshed and adapted to different process equipment
Real time position feedback, dynamically correcting the walking path of the robotic arm
Original factory unified hardware standards, easy to replace spare parts
NOVELLUS 02-425998-00 robot controller has precise positioning and convenient operation and maintenance, and is an essential mechanical arm control accessory for semiconductor thin film equipment.
Product detailed pictures：
02-425998-00
product video
Other links
Siemens 193-1CL00-0XA0 数字输出模块
A-B 1747-ASBPLC模块
HONEYWELL 8C-PCNT01 51454363-175扩展模块
Other links
Tachibana Tectron TVC-04KET Power Supply Module
PARKER ZETA4 servo drive
Siemens 6ES7331-7NF00-0AB0 Analog Input Module
