LAM 826-151520-001 Controller Module  

Product Manual：

LAM 826-151520-001 Controller Module Product Features
LAM 826-151520-001 is a specialized process control module for Panlin etching equipment, which controls the coordinated operation of cavity gas path, RF, and sensing, and is suitable for dust-free mass production lines. Its characteristics are as follows:
Industrial grade core computing chip, 24-hour uninterrupted mass production and stable operation
Integrated multi-channel analog digital hybrid I/O, collecting chamber pressure and temperature signals
Independent optocoupler isolation circuit to isolate cabinet RF electromagnetic interference
Nanosecond level timing regulation, matching precision wafer etching process timing
Onboard large capacity cache, real-time processing of multiple sets of process data without delay
Dedicated equipment bus interface, interconnected with the main control and RF power supply of the entire machine
Four layer hardware safety protection for overvoltage, overcurrent, overtemperature, and short circuit

Card type direct insertion installation structure, can be disassembled and replaced with a short shutdown
Wide temperature component selection, suitable for alternating cold and hot working conditions in cabinets
Built in fault diagnosis program, code quickly locates circuit component faults
Synchronized linkage of multiple solenoid valves, precise control of process gas ratio
Low power circuit layout, low temperature rise during full load operation, and less likely to accumulate heat
The firmware is locally rewritable and compatible with multiple etching machines of the same series
Real time signal closed-loop feedback, dynamically correcting cavity process parameters
Original factory unified hardware version, replacement of spare parts of the same model does not require calibration
The LAM 826-151520-001 controller module has strong anti-interference and easy operation and maintenance, and is a core process control spare part for LAM semiconductor etching equipment.

Product detailed pictures：

826-151520-001

product video

Other links

HITACHI LPF240A控制器
FOXBORO FBM223 P0917HDI/o模块
HITACHI LYT000A控制模块

Other links

134177-001 Power Base
HIMA K9202 Cabinet Fan Module
SPBRC410 Controller Module