VAT 09040-PE44-AOF high-pressure gate valve

Product Manual：

VAT 09040-PE44-AOF high-pressure gate valve
VAT 09040-PE44-AOF is a pneumatic gate valve specifically designed for semiconductor vacuum equipment, used for isolating chamber pipelines.
Stainless steel valve body, corrosion-resistant process gas
Good sealing performance and low cavity leakage rate
Pneumatic drive, smooth switch with less dust
Equipped with a position sensor to provide feedback on valve status
Capable of withstanding high and low pressure differentials and adapting to high-pressure vacuum conditions
Smooth internal transmission, frequent opening and closing without jamming
The internal structure is not prone to dust accumulation, protecting the cleanliness of the wafer

High temperature resistance, suitable for use in high-temperature process chambers
Standard flange interface, compatible with universal vacuum pipelines
Support automatic opening and closing of equipment electronic control
Equipped with a heat dissipation structure to prevent high temperature damage to drive components
Sealing and sensor accessories can be replaced separately
Dustproof shell, suitable for dust-free workshop environment
Smooth passage, fast vacuum pumping speed of the cavity
Standard installation size, directly replace with the same model
In summary, the VAT 09040-PE44-AOF high-pressure gate valve has reliable sealing and easy maintenance, making it an essential valve spare part for semiconductor vacuum chambers.

Product detailed pictures：

09040-PE44-AOF

product video

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