DAIHEN 3Z39-000001-V1 RF Automatic Matcher

Product Manual：

DAIHEN 3Z39-000001-V1 RF Automatic Matcher
Introduction: DAIHEN 3Z39-000001-V1 semiconductor RF matching accessories, with fast matching speed and stable output, suitable for plasma process equipment.
Automatically and quickly match load impedance to reduce reflected power
Compatible with DAIHEN RF power supply, with high compatibility from the original factory
Built in over power, over temperature, and standing wave protection functions
Low power loss, higher RF output efficiency
Modular structure, easy maintenance and replacement
Equipped with a built-in fault indicator light, any abnormalities are immediately apparent

Metal sealed chamber, dustproof and resistant to slight vibrations
Real time digital monitoring of standing wave and power values
Supports remote communication and can be connected to the device’s main control system
Cleanroom compatible material, corrosion-resistant and not prone to fouling
Fast response speed, real-time adjustment of cavity load changes
Standard wiring interface, no need for additional modification or adapter
Wide temperature stable operation, capable of long-term continuous production
Power on automatic self check, quickly troubleshoot circuit faults
Compact size, saving installation space inside the equipment
Conclusion: DAIHEN 3Z39-000001-V1 has complete protection and excellent matching performance, and is the core RF spare part of plasma coating etching equipment.

Product detailed pictures：

3Z39-000001-V1

product video

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