AMAT 0190-B9760 Vacuum Controller

Product Manual：

AMAT 0190-B9760 Vacuum Controller
Introduction: AMAT 0190-B9760 is a specialized vacuum controller for semiconductor equipment, with precise and stable pressure control, suitable for long-term production of coating and etching vacuum chambers.
Accurately adjust the vacuum degree of the chamber, with minimal pressure fluctuations
Real time collection of vacuum pressure data, real-time feedback regulation
Integrated multiple safety protections against overvoltage, overload, and overheating
Circuit isolation design to resist electromagnetic interference in the workshop
Intuitive status indicator light, clear and visible fault alarm
Standard plug-in interface, easy and fast disassembly and replacement
Original factory compatible with AMAT’s various process vacuum equipment

Supports bus communication and can be linked to the main control system of the entire machine
Power on automatic self check, quickly locate line faults
Small board structure, saving installation space for control cabinets
Industrial durable components, resistant to dust and slight vibrations
Wide temperature working range, stable operation of clean workshop
Can store multiple sets of vacuum process parameters, easy to switch
Automatic recording of fault data for easy maintenance and troubleshooting
Low operating power consumption, low heat generation during long-term continuous operation
Conclusion: AMAT 0190-B9760 has high control accuracy and strong compatibility, and is a core control spare part for semiconductor vacuum systems.

Product detailed pictures：

0190-B9760

product video

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