TEL 3R81-000017-12 Printed Circuit Board
Product Manual：
TEL 388-200206-V1 Temperature Controller
Introduction: TEL 388-200206-V1 is a temperature control device specifically designed for Tokyo Electronics semiconductor chambers, which accurately controls the heating temperature of the chamber and stabilizes the thin film process environment.
High temperature measurement accuracy and minimal temperature fluctuation control range
Support multiple sets of temperature probes to synchronously collect temperature data
Built in anti-interference filtering circuit, factory clutter does not affect temperature measurement
Automatic alarm protection for overheating, short circuit, and load faults
Original factory standard installation size, direct replacement of spare parts of the same model
Sealed dustproof shell, suitable for dust-free and clean production workshops
Closed loop automatic temperature control, quickly adjust temperature difference to maintain set value
Standardized communication port, capable of synchronizing data to the device controller
The body structure is compact, and the installation space of the cabinet is small
Wide temperature working range, continuous operation for 7 × 24 hours without drift
Corrosion resistant internal circuit, resistant to trace process corrosive gases
Equipped with a status indicator light, the operation and fault status are visually visible
Anti vibration reinforced shell, stable temperature measurement data during machine operation
Modular split structure, easy and labor-saving maintenance and disassembly operations
Industrial grade temperature control components with stable long-term performance
Conclusion: TEL 388-200206-V1 has precise temperature control and high reliability, and is a core temperature control spare part for Tokyo Electronic Etching and Coating Equipment.
Product detailed pictures：
3R81-000017-12
product video
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