DELTA TAU PEL3-BE0-4L0-0 Ethernet Control Module  

Product Manual：

DELTA TAU PEL3-BE0-4L0-0 Ethernet Control Module
Introduction: Taidao Ethernet motion control module, used for precise multi axis motion control of semiconductor equipment
Adopting real-time kernel, fast response speed for motion computation
EtherCAT bus, capable of driving multiple servos to operate synchronously
Dual network port design, connected to the upper computer for stable data transmission
Supports multiple motion control modes and high positioning accuracy
Built in programmable logic, capable of writing equipment process programs
Sealed fanless structure, dust-proof and suitable for dust-free workshops
Circuit with filtering to resist on-site electromagnetic interference

Supports multiple networking methods, making it difficult for the entire machine to shut down due to line failures
Enrich IO points and connect various sensor signals
Automatic alarm protection for communication, overload, and overcurrent faults
Panel indicator light, quickly determine various fault states
Rail type small body, saving cabinet installation space
Store operation logs for easy maintenance and troubleshooting
Supporting debugging software, one click tuning to suppress mechanical resonance
Small multi axis synchronization error, suitable for high-precision stage equipment
Conclusion: DELTA TAU PEL3-BE0-4L0-0 synchronous control is stable and is a commonly used motion control spare part for lithography and wafer inspection equipment

Product detailed pictures：

PEL3-BE0-4L0-0

product video

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