MITSHUBISHI RC-1UHC-SAT07 Robot Controller
Product Manual：
MITSUBISHI RC-1UHC-SAT07 Robot Controller
Introduction: MITSUBISHI RC-1UHC-SAT07 is an integrated controller for semiconductor wafer handling dedicated clean robots, which controls the handling, positioning, and overall signal linkage of the robotic arm.
Clean room specific model, suitable for wafer transfer dust-free process environment
Multi axis synchronous servo control, high repeatability accuracy in handling and positioning
Smooth motion trajectory algorithm, no impact or collision during wafer picking and placing
Built in collision detection protection, immediately stop the machine and sound an alarm when encountering foreign objects
High speed bus communication, fast docking with etching and coating hosts
Multiple isolated IO ports, linked sensors and gate valve mechanisms
Equipped with thermal error compensation, stable accuracy during long-term operation
Power off memory exercise program, restart without needing to re teach
Real time fault self check, quickly locate motor and communication faults
Multiple circuit safety protection against overvoltage, overcurrent, and overheating
Support visual synchronization triggering, in conjunction with visual alignment tasks
Low dust sealed shell, suitable for semiconductor dust-free workshops
Compact integrated structure, space saving installation inside the equipment
Standard original factory procedure, directly used on the machine after replacement
Support 24-hour uninterrupted continuous production line operation
Conclusion: MITSUBISHI RC-1UHC-SAT07 is a clean, stable, and accurately positioned core control spare part for semiconductor wafer handling equipment.
Product detailed pictures：
RC-1UHC-SAT07
product video
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