Verity 3D80-00906-V6 Sensor
Product Manual：
Verity 3D80-00906-V6 Sensor
Introduction: Verity 3D80-000906-V6 is an EPD high-precision plasma optical detection sensor specifically designed for TEL semiconductor etching/thin film machines, which monitors the plasma state of the cavity and wafer process conditions in real time.
Compatible with TEL series vacuum process chambers, fully matched with original factory programs
High resolution optical acquisition, capturing weak plasma spectral signals
Built in signal noise reduction filter, shielding electromagnetic interference in RF machine room
Millisecond level real-time sampling, fast feedback of plasma fluctuation changes
Corrosion resistant optical window, compatible with corrosive process reaction gases
Digital bus communication, real-time transmission of detection data with the machine master control
Custom process threshold, automatic interlocking alarm triggered by plasma abnormality
Multiple circuit protection against overheating, overvoltage, and static electricity to extend service life
Equipped with hardware self-test function, quickly locate optical and circuit faults
Power off to save calibration parameters, no need to recalibrate the optical path after replacement
Small integrated sealing structure, suitable for dust-free clean workshop environment
Standardized vacuum installation interface, simple and reliable disassembly and replacement of seals
Long life photosensitive components, supporting continuous production 24/7
Accurate process compensation output to ensure uniformity of wafer etching and coating
Anti vibration light path fixed structure, no signal drift during machine operation
Conclusion: Verity 3D80-000906-V6 has high detection sensitivity and strong adaptability, making it a core optical sensing spare part for semiconductor plasma process equipment.
Product detailed pictures：
3D80-000906-V6
product video
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