TEL 5868-000002-V1 thyristor control unit
Product Manual：
TEL 5868-000002-V1 thyristor control unit
Introduction: TEL 5868-000002-V1 is a power regulating thyristor control board for Tokyo Electronic Semiconductor Equipment.
Compatible with TEL 5868 series etching/coating process machine, original factory matching
Thyristor phase-shifting voltage regulation, precise control of heating and RF auxiliary power output
Receive 4-20mA/0-10V control signals from the main controller and linearly adjust the output power
Built in soft start logic, suppresses power on surge current, protects heating load
Integrate multiple hardware protections for current, voltage, and temperature, and quickly cut off output in case of abnormalities
RC absorption circuit, suppresses high voltage spikes, prevents thyristor breakdown and damage
Isolation communication interface, real-time synchronization of power parameters with the main control of the whole machine
Line partition shielding to resist workshop RF electromagnetic interference
Gold plated fingers, stable and non oxidizing contact during long-term insertion and removal in the clean room
Onboard fault indicator light, intuitive alarm prompt for overcurrent/overheating/short circuit
Flash storage power calibration parameters, no need to recalibrate after power failure and restart
Three proof coating on circuit board, dustproof and moisture-proof, suitable for dust-free production environment
Standard plug-in card structure, cabinet backplane straight insertion, easy disassembly and replacement
Equipped with power sampling feedback, closed-loop voltage regulation and temperature control, the process is uniform and stable
Industrial high-temperature resistant power components, supporting continuous production for 7 × 24 hours
Conclusion: TEL 5868-000002-V1 has precise voltage regulation and complete protection, and is a core power control spare part for semiconductor process equipment
Product detailed pictures：
5868-000002-V1
product video
Other links
SM810K01 3BSE030928R1 CPU processor module
Foxboro FBM232 P0926GW Ethernet Communication Module
EKF ETH4 CN4-BELL Ethernet Controller
Other links
EATON DPM-MC2 Main communication module
GE IC660ELB912J Gas turbine module
IC660ELB921M Gas turbine electrical card
