Kyosan HPK10ZI-TE1 power module
Product Manual：
Kyosan HPK10ZI-TE1 power module product features
Introduction: Kyosan HPK10ZI-TE1 is a DC power module specifically designed for semiconductor sputtering in the Jingsan HPK series. It features digital voltage control and is compatible with coating processes.
Built in CPU digital control, precise voltage and current regulation
Equipped with high-speed arc extinguishing function to suppress sputtering arc damage to the target material
Wide range DC output, suitable for various thin film deposition processes
Support coupling and linkage with RF power supply, compatible with composite coating equipment
Standard rack mounted body, convenient and space saving cabinet installation
Comes with a communication interface for remote monitoring and parameter modification
Multiple hardware protection, automatic shutdown due to overvoltage, overcurrent, overheating, short circuit
Low ripple stable output, ensuring film uniformity
Air cooled cooling structure, continuous operation for a long time without heating up
Industrial reinforced body, anti vibration and adaptable to production line environment
Customizable current and voltage thresholds, suitable for different target materials
Real time working condition display, intuitive fault code prompt for abnormalities
Wide range communication input, suitable for different power supply environments in factories
Arc free sputtering adaptation for ITO and optical film production
Original factory standard interface, can directly replace spare parts of the same series
Conclusion: The Kyosan HPK10ZI-TE1 power module has stable power control and excellent arc extinguishing performance, making it the core power supply unit for semiconductor and optical coating equipment.
Product detailed pictures：
HPK10ZI-TE1
product video
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