TEL 3381-000136-15 Interface Module
Product Manual：
TEL 3381-000136-15 Interface Module
Introduction: TEL 3381-000136-15 is an original I/O signal conversion interface module for Tokyo Electronic Etching Equipment, responsible for centralized transmission and control of various signals in the cavity.
Compatible with TEL 3381 series semiconductor process equipment, factory replacement spare parts
Integrate multiple digital input and output channels to collect signals from cavity sensors
Optoelectronic isolation circuit, isolating electromagnetic interference in the cavity to avoid signal disorder
Onboard multiple sets of status indicator lights, visually viewing the operating status of each channel
Standard backplane slot direct insertion installation, easy to disassemble and replace, time-saving
Real time data verification ensures no loss or distortion in the transmission of process signals
24V standard DC power supply, matched with equipment cabinet power supply specifications
Multiple hardware protections against overvoltage, short circuit, and surge to protect the main control board
Unified standard pins, no need to change wires, directly replace spare parts of the same model
Reinforced PCB board, anti vibration and suitable for dust-free wafer workshop environment
On site execution components such as linkage valve group, limit, vacuum detection, etc
Support device security interlock logic to avoid wafer collision risks
Power on automatic hardware self-test, quickly locate line channel faults
Long life industrial components reduce the frequency of production line downtime and maintenance
Suitable for stable operation of mass production chambers for dry etching and thin film deposition
Conclusion: TEL 3381-000136-15 interface module has stable signal conversion and complete protection, and is the core I/O transfer board of TEL semiconductor equipment cavity.
Product detailed pictures：
3381-000136-15
product video
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