RKC 2L80-001578-V1 heater box  

Product Manual：

RKC 2L80-001578-V1 heater box
Introduction: RKC 2L80-001578-V1 is an integrated heating and temperature control module for TEL semiconductor etching equipment, responsible for constant temperature and anti condensation of pipelines.
Compatible with TEL 2L80 series process equipment, original replacement parts from the factory
Built in heating element and RKC temperature control unit, PID precise temperature control
Stable heating process pipeline to prevent blockage caused by by-product crystallization
Support thermocouple temperature acquisition, real-time closed-loop temperature control
Equipped with dual alarm functions for heater disconnection and overheating
Metal enclosed clean shell, suitable for dust-free wafer workshops
Built in electromagnetic isolation to resist plasma interference in the cavity
The status indicator light intuitively displays heating and fault conditions

Standard wiring terminals, no need to change wires for disassembly and replacement
Multiple overheating and short circuit hardware safety protection
Fast heating response, small temperature fluctuations ensure stable process
The whole machine has a modular integrated structure, making maintenance convenient
Compatible with device main control communication, upload temperature data
Long life heating components reduce the frequency of production line downtime
Corrosion resistant casing, suitable for the surrounding environment of corrosive processes
Conclusion: RKC 2L80-001578-V1 has precise and reliable temperature control, and is the core heating component for semiconductor gas path constant temperature.

Product detailed pictures：

2L80-001578-V1

product video

Other links

LAM 810-800081-022 controller module
Zygo 8010-0105-02 ZMI-501 Channel Isolation Board
 07AI90-S GJR5251200R0202 Analysis Input Unit

Other links

REF615C-D HCFFAEAGABC2BAA1XD control screen
TP858 3BSE018138R1 base module
140CPU67260 processor module