DAIHEN 3Z80-001051-V2 Digital Plasma Controller

Product Manual：

DAIHEN 3Z80-001051-V2 Digital Plasma Controller
Introduction: DAIHEN 3Z80-001051-V2 semiconductor machine plasma dedicated controller, digital precision control of plasma, suitable for etching and deposition equipment.
All digital DSP operation, high power regulation accuracy
Pulse adjustable output, suitable for various wafer processes
Automatic impedance matching, stable plasma state
Small output fluctuations, reducing wafer process damage
Built in multiple protections for overvoltage, overcurrent, and short circuit
Multiple communication interfaces to interface with the main control system of the device
Real time data collection, recording process operating parameters

Equipped with built-in fault self check and quick alarm prompt for abnormalities
Metal shielding shell, resistant to electromagnetic interference in the workshop
Wide temperature industrial components, suitable for high and low temperature environments of machines
Strengthen the internal structure to prevent equipment from easily malfunctioning due to vibration
Original factory standard wiring port, easy to disassemble and replace
Moisture proof and anti-corrosion treatment, suitable for clean workshop conditions
Support storage and retrieval of multiple sets of process formulas
Long term aging testing at the factory, low failure rate during continuous operation
Conclusion: DAIHEN 3Z80-001051-V2 has precise control, complete protection, stable maintenance of plasma process status, and reduces production line downtime for maintenance.

Product detailed pictures：

3Z80-001051-V2

product video

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