NOVELLUS 02-281592-00 Digital Dynamic Controller  

Product Manual：

NOVELLUS 02-281592-00 Digital Dynamic Controller
Introduction: NOVELLUS 02-281592-00 is a specialized digital dynamic control board for semiconductor deposition equipment, which controls the adjustment of process dynamic parameters in control chambers.
Compatible with Novellus CVD thin film deposition process equipment across the entire range
High speed digital signal processing, fast dynamic parameter response speed
Multiple independent control channels, respectively controlling the gas path and plasma parameters
Electrical isolation circuit, isolating strong electromagnetic interference in the workshop
Built in multiple circuit protection against overvoltage, overcurrent, and static electricity
Real time collection of chamber pressure and flow feedback signals for closed-loop control
Onboard fault indicator light, quickly locate abnormal control circuit

Standard card slot installation, easy disassembly, replacement, and maintenance
Gold plated pad design, stable contact under long-term high temperature conditions
Three proof coating protection, moisture-proof and dust-proof, suitable for clean workshops
Precise impedance wiring, distortion free transmission of weak sensing signals
Support device bus communication and interface with the main control system of the entire machine
Store multiple sets of process formulas and switch deposition programs with just one click
Reinforce PCB wiring to withstand continuous vibration operation of equipment
24-hour uninterrupted wafer production and stable operation
Conclusion: NOVELLUS 02-281592-00 has precise control and reliable anti-interference, and is the core dynamic control component of semiconductor thin film equipment.

Product detailed pictures：

02-281592-00

product video

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