KOMATSU AIC-8-12-UL-D-R Temperature Controller
Product Manual：
KOMATSU AIC-8-12-UL-D-R Temperature Controller
Introduction: KOMATSU AIC-8-12-UL-D-R is an integrated precision temperature control machine dedicated to Komatsu electronic semiconductor equipment, which controls the constant temperature of wafer process chambers
Equipped with PID self-tuning algorithm, stable temperature control and small temperature overshoot
Supports multi-channel thermocouple and thermistor signal acquisition, with high temperature measurement accuracy
Equipped with a digital control panel, it displays the measured temperature and set value in real-time
Dual independent temperature control output, capable of synchronously controlling two sets of heating loads
Built in high and low temperature over limit alarm, with abnormal sound and light prompts to quickly identify faults
Equipped with RS232 communication interface, connect to the main control of the machine to upload temperature data
The whole machine has a metal stainless steel shell, which is dust-proof and suitable for clean and dust-free workshops
Internal circuit shielding design to resist workshop RF electromagnetic interference
Integrated multiple circuit protection for over temperature, over current, and short circuit
Standard industrial power supply specifications, suitable for semiconductor production line power supply environment
Reserved external testing port for convenient on-site maintenance and parameter calibration
Original Japanese components from the factory, supporting 7 × 24-hour continuous operation
Modular integrated structure, direct replacement of the same model without the need for equipment modification
Can store multiple sets of process temperature formulas and switch production processes with just one click
UL industrial safety certification, compliant with semiconductor equipment import testing standards
Conclusion: KOMATSU AIC-8-12-UL-D-R has precise temperature control and complete protection, as well as original temperature control spare parts for etching and deposition machines
Product detailed pictures：
AIC-8-12-UL-D- R
product video
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