Shimadzu EI-D3203M Turbomolecular Pump Controller Unit
Product Manual：
Shimadzu EI-D3203M Turbomolecular Pump Controller Unit
Introduction: Shimadzu EI-D3203M is compatible with Shimadzu magnetic levitation molecular pump, which controls the start stop and speed of the vacuum unit, ensuring stable operation
Compatible with TMP-3203LM series magnetic levitation turbo molecular pump, with high drive matching
AC200-240V wide input, suitable for voltage fluctuation conditions in the factory area
The speed can be adjusted from 25% to 100%, and the pumping rate of the cavity can be flexibly controlled
Front LCD display screen, real-time display of speed, current, imbalance value and fault code
Equipped with dual communication interfaces of RS232C and RS485, supporting remote monitoring by the upper computer
Up to 32 molecular pumps can be managed and controlled by the network, compatible with multi chamber production lines
Multiple relay signal terminals for remote start stop, low-speed, and alarm interlocking
Built in imbalance monitoring, predicting blade fouling and abnormal vibration in advance
Multiple protections: overcurrent, overheating, overload, demagnetization automatic shutdown alarm
Integrated maintenance timing function, providing scheduled reminders for maintenance and repair of the pump body
Low harmonic output reduces electromagnetic interference to surrounding industrial control boards
Rack standard size, embedded installation in the cabinet, easy disassembly and assembly
Integrated cooling fan with controllable temperature rise for long-term continuous operation
Compliant with SEMI and CE industry standards, suitable for semiconductor cleanrooms
Original factory matching driver specifications, this Shimadzu EI-D3203M is compatible with coating and etching vacuum equipment
Conclusion: Stable maintenance of ultra-high vacuum environment in the chamber, Shimadzu EI-D3203M molecular pump dedicated control power supply spare parts
Product detailed pictures：
EI-D3203M
product video
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