MKS 0190-45963 acquisition module

Product Manual：

MKS 0190-45963 acquisition module
Introduction: MKS 0190-45963 Semiconductor Equipment Dedicated Signal Acquisition Board, capable of collecting vacuum and gas sensing signals
High precision analog-to-digital conversion, small pressure and flow measurement errors
Multi channel synchronous acquisition, compatible with MFC and vacuum gauge sensors
Onboard optoelectronic isolation to resist RF and motor electromagnetic interference
Short circuit and overvoltage circuit protection, less likely to burn the board
Adapt to semiconductor equipment bus and communicate with the main control at high speed
CPCI plug-in card structure, convenient for cabinet insertion and replacement
Channel indicator light, quickly locate and collect abnormal points
Built in filtering circuit to eliminate signal clutter and fluctuations

Industrial wide temperature element device, clean production line operates stably 24 hours a day
Real time upload and collection of data for process closed-loop control
Store historical collection records for easy fault tracing and analysis
Standardized interface terminals, replacement without changing external circuits
Anti vibration PCB board, suitable for chamber equipment working conditions
Support parallel expansion of acquisition points for multiple modules
This MKS 0190-45963 is compatible with etching and thin film vacuum machines
Conclusion: Precise Collection of Vacuum and Gas Process Data, MKS 0190-45963 Semiconductor Specialized Collection Spare Parts

Product detailed pictures：

0190-45963

product video

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