VAT 61234-KEAP-AQN Control Butterfly Valve System
Product Manual：
VAT 61234-KEPA-AQN Control Butterfly Valve System Product Features
VAT 61234-KEPA-AQN integrated controller with fast response speed for vacuum pressure regulation
Precise butterfly plate throttling structure, precise control of pipeline gas conductivity
Double layer sealing structure, stable sealing performance without leakage under high vacuum conditions
Equipped with adaptive learning algorithm, automatically adapting to various process gas working conditions
Supports digital and analog multi-channel signal input, compatible with various vacuum sensors
Compatible with DeviceNet communication interface, capable of accessing device automation control systems
The body is made of aluminum alloy material, which is lightweight, corrosion-resistant, and resistant to process dust
ISO-KF standard flange interface, with strong universality for installation and docking
Built in status display module, providing real-time feedback on valve position and operating parameters
Automatic maintenance reminder function, early warning of easily worn sealing accessories
High intensity drive actuator, long-term high-frequency opening and closing are not prone to jamming faults
Equipped with a dedicated maintenance interface, external equipment can quickly troubleshoot system abnormalities
Wide range vacuum adaptation, capable of stable operation of high and low vacuum range processes
Anti dust special valve body design, suitable for harsh semiconductor deposition processes
Standardized overall dimensions, can directly replace VAT butterfly valve accessories of the same series
The VAT 61234-KEPA-AQN control butterfly valve system is a precision pressure regulating valve body specifically designed for semiconductor vacuum equipment
Product detailed pictures：
61234-KEAP-AQN
product video
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