MEGA-FABS 00070-2015-000-01 Thermal Control Module

Product Manual：

MEGA-FABS 00070-2015-000-01 Thermal Control Module Product Features
MEGA-FABS 00070-2015-000-01 is suitable for semiconductor equipment temperature control scenarios
Equipped with high-precision temperature control algorithm, the temperature adjustment error is extremely small
Multi channel temperature acquisition channel, synchronously monitoring temperature at multiple locations
Support customization of multi-stage programs for heating, insulation, and cooling
Built in temperature over limit, water shortage, overload multiple alarm protection
Real time temperature data upload, connected to the upper control system
Low vibration operating structure, does not interfere with wafer precision processes

Compact module structure, saving installation space inside the equipment
Optimization of thermal conduction circuit, uniform temperature distribution inside the cavity without hotspots
Acid and alkali resistant protective shell, suitable for clean workshop process environment
Wide voltage power supply adapts to grid fluctuations, temperature control is uninterrupted
Equipped with a status indicator light for quick identification of abnormal faults
Metal reinforced internal components, resistant to long-term vibration and not easily damaged
Standardized docking interface, easy disassembly and replacement process
Original factory matching program, perfectly matched with MEGA-FABS testing equipment
MEGA-FABS 00070-2015-000-01 Thermal Control Module is a specialized temperature control accessory for semiconductor testing equipment

Product detailed pictures：

00070-2015-000-01

product video

Other links

Stahl 9460/12-08-11 signal isolator
SST PB3-PCIE-2 Printed Circuit Board
SQUARE CLE-202001 DC Converter

Other links

KOLLMORGEN CB06551 PRD-B040SSIB-63 Driver module
KSD211B 3BHE022455R1101 coupler
PP845 3BSE042235R1 Touch screen