TEL 2L80-050254-V1 pressure regulator  

Product Manual：

TEL 2L80-050254-V1 Pressure Regulator Product Features
TEL 2L80-050254-V1 is compatible with semiconductor etching machine gas path pressure control
High precision micro pressure regulation, stable chamber process gas supply pressure
Built in pressure sensor feedback, real-time automatic correction of pressure fluctuations
Corrosion resistant sealed valve body, suitable for special process gas environments
Quick response pressure regulation, airflow switching without sudden pressure changes or impacts
Equipped with pressure upper and lower limit alarm, automatically cuts off the gas path when overpressure occurs
Integrated signal output, real-time uploading of pressure values to the main control
Small integrated structure, saving equipment air control box space

Internal precision filtration structure, blocking dust and impurities from blocking the valve port
High and low temperature resistant components, suitable for long-term operation under constant temperature conditions in the workshop
Standardized gas path quick plug interface, easy to disassemble and repair
Low leakage sealing design reduces process gas loss
Multiple overload and overvoltage protection to prevent valve body damage and shutdown
The status display light is intuitive and can quickly identify abnormal pressure faults
Original factory supporting program, perfectly compatible with TEL series process equipment
TEL 2L80-050254-V1 pressure regulator is a precision pressure regulating accessory specifically designed for semiconductor chamber gas supply

Product detailed pictures：

2L80-050254-V1

product video

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