NIKON 4S013-545-2 Stepper Scanner  

Product Manual：

NIKON 4S013-545-2 Stepper Scanner Product Features
NIKON 4S013-545-2 compatible with Nikon lithography machine step scan imaging acquisition
Accurately collecting optical sensing signals to ensure wafer alignment accuracy
Shielding circuit design to weaken cavity RF signal interference
High speed data transmission, continuous scanning without image loss or frame loss
Single channel independent protection, faults do not affect the overall operation of the machine
Industrial radiation resistant PCB, not easily aged in long-term machine environment
Gold plated slot contacts, stable contact after frequent insertion and removal

Partition signal filtering, strong and weak optical path signals do not interfere with each other
Built in data validation to reduce the probability of imaging distortion
Reinforce solder pads to resist equipment vibration and prevent virtual soldering
Small board structure, suitable for narrow installation space of machines
Multi channel IO interface, compatible with optical detection sensors
Equipped with channel fault light, easy and efficient maintenance and troubleshooting
Wide temperature components, 24-hour mass production and stable operation
Unified standard specifications, same model lithography accessories can be directly replaced
The NIKON 4S013-545-2 stepper scanner is the core image acquisition board of Nikon semiconductor lithography equipment

Product detailed pictures：

4S013-545-2

product video

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