TEL F17-62151-2 Ultrasonic Flow Meter
Product Manual：
TEL F17-62151-2 ultrasonic flowmeter is a specialized fluid measuring instrument for Tokyo Electronic Semiconductor Equipment, with the following core features:
1. Non invasive measurement structure, no contact with high-purity process fluids, no risk of medium contamination
2. No built-in mechanical moving parts, long-term operation without wear and tear, low maintenance frequency
3. High precision time difference detection algorithm with small measurement errors for small flow rates
4. Fully isolated signal processing circuit to resist high-frequency electromagnetic interference in the workshop
5. Suitable for measuring clean media such as semiconductor ultrapure water and chemical solutions
6. Wide temperature and pressure resistant body, matched with machine temperature rise and fall cycle working conditions
7. Native adaptation TEL etching and thin film deposition machine control system
8. Comes with 4-20mA and digital communication interface for easy data collection on the production line
9. Low flow rate recognition capability, capable of monitoring the transportation of trace process fluids
10. Integrated sealed shell, dustproof and moisture-proof, suitable for dust-free workshop environment
11. Bidirectional flow recognition, capable of monitoring abnormal fluid reflux conditions
12. Zero pipeline pressure loss design, without changing the fluid pressure of the process pipeline
13. Gold plated sensing probe, stable signal transmission and not easily attenuated
14. Built in fault self checking function, real-time alarm prompt for abnormal traffic
15. Standard installation hole position, replacing the original instrument without changing the pipeline
TEL F17-62151-2 ultrasonic flowmeter stably controls the flow rate of semiconductor process fluids, ensuring precise and controllable process parameters
Product detailed pictures：
F17-621561-2
product video
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