AMA 0090-A7720 Filter Box  

Product Manual：

AMAT 0090-A7720 filter box is compatible with semiconductor process chambers for application materials.
1. High cleanliness sealed shell, no dust deposition or wafer contamination
2. Multi layer composite filter material, synchronously intercepting particles and gaseous impurities
3. Large dust capacity design, extending replacement cycle and reducing downtime
4. Acid alkali corrosion resistant material, suitable for process chemical environment
5. Integrated locking structure, no air or liquid leakage under vibration conditions
6. Low airflow resistance, does not affect the stability of internal air pressure in the chamber
7. Standard factory card position, disassembly and replacement without changing the pipeline

8. High temperature resistant structure, capable of withstanding equipment temperature rise and fall cycles
9. No fiber shedding filter layer, ensuring process cleanliness
10. Built in diversion channel, uniform airflow distribution and sufficient filtration
11. Moisture resistant and antioxidant shell, not easily aged after long-term use
12. Lightweight and compact design, saving internal space of the machine
13. Factory air tightness testing to eliminate the risk of cavity leakage
14. Matching AMAT etching deposition equipment, original compatible
15. Modular independent structure, easy replacement and maintenance of single box
AMAT 0090-A7720 filter box purifies the chamber medium, ensuring stable chip process quality.

Product detailed pictures：

0090-A7720

product video

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