AE 2301260-A Controller Module

Product Manual：

The AE 2301260-A controller module is compatible with AE RF power semiconductor plasma equipment.
1. RF power closed-loop regulation, stable output of plasma process power
2. Multi channel sensing acquisition, synchronized feedback of voltage and current data
3. Built in electrical isolation circuit to isolate electromagnetic clutter interference in the workshop
4. Gold plated terminal interface, stable and oxidation free contact after long-term plugging and unplugging
5. Independent channel protection, single channel failure does not affect the overall operation of the machine
6. Multi level signal filtering to suppress instantaneous high-voltage pulse impact
7. Multi layer precision PCB wiring with low high-frequency RF signal loss

8. Reinforced SMT process, capable of withstanding long-term vibrations of the machine
9. Wide temperature industrial substrate, suitable for chamber cold and hot cycle working conditions
10. Array heat dissipation through holes, stable and controllable temperature rise during full load operation
11. Moisture resistant solder mask coating, delaying corrosion and aging of the circuit
12. Equipped with parameter self-test, quickly locate RF abnormal faults
13. Standard rack installation size, can be directly replaced without changing the wiring
14. Compatible with all AE series RF power supplies, communication protocol matching
15. Modular split structure, saving time and effort in maintenance and replacement
The AE 2301260-A controller module precisely controls the plasma process, ensuring stable mass production of wafer equipment.

Product detailed pictures：

2301260-A

product video

Other links

BALANCE GESVIG-4W power module
AUTOMAX 57C416 Input/Output Module
TC-4000-S-ES servo controller

Other links

BALANCE GESVIG-4W power module
AUTOMAX 57C416 Input/Output Module
TC-4000-S-ES servo controller