AMAT 0010-11590 Controller
Product Manual：
AMAT 0010-11590 controller is compatible with semiconductor vacuum process equipment for application materials.
1. Integrate the main control operation chip and coordinate the entire process control logic of the cavity
2. Multi channel synchronous acquisition of pressure, flow, and temperature sensing signals
3. Built in electrical isolation circuit to isolate electromagnetic signal interference in the workshop
4. Gold plated interface terminals, stable and not easily oxidized after long-term plugging and unplugging
5. Single channel independent protection, single channel failure does not interrupt the operation of the whole machine
6. Real time closed-loop automatic adjustment, stable correction of process parameters
7. Multi level signal filtering to reduce control deviation caused by clutter
8. Reinforce the surface mounted PCB to withstand long-term vibration and impact of the machine
9. Clean grade specialized board, suitable for dust-free wafer production environment
10. Layout of heat dissipation through holes, stable and controllable temperature rise during full load operation
11. Moisture resistant solder mask coating, delaying corrosion and aging of internal circuits
12. Comes with a built-in fault self checking program to quickly locate equipment abnormalities
13. Standard rack installation size, can be directly replaced without changing the wiring
14. Native matching AMAT device communication protocol, original adaptation
15. Modular split structure, time-saving and efficient maintenance and replacement
The AMAT 0010-11590 controller precisely controls the process parameters of the cavity to ensure stable mass production on the production line.
Product detailed pictures：
0010-11590
product video
Other links
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