MKS 901P-11130-0167 Vacuum Pressure Sensor
Product Manual：
MKS 901P-11130-0167 Vacuum Pressure Sensor
Introduction: MKS 901P-11130-0167 semiconductor equipment dedicated vacuum pressure sensor, real-time detection of vacuum values inside the cavity.
1. Wide measurement range, accurate detection of high and low vacuum
2. Stable measurement data, less susceptible to interference from process gases
3. The sensing chip responds sensitively and provides rapid feedback on pressure changes
4. Installation at any angle without affecting measurement accuracy
5. Low emission stainless steel material, suitable for high vacuum dust-free environment
6. Equipped with overvoltage protection to prevent damage to components caused by pressure impact
7. Supports bus communication and can upload pressure data to the host in real-time
8. Equipped with pressure threshold output and linked valve automatic control
9. Integrated design, occupying minimal installation space
10. Solid state sensing structure, capable of withstanding long-term vibrations of equipment
11. Standard flange interface, easy to disassemble and seal
12. Analog signal output, compatible with various industrial control acquisition boards
13. Equipped with self checking function, automatic fault prompt
14. Low operating power consumption, low heat generation during long-term operation
15. Compatible with mainstream wafer processing equipment, no need for complex calibration after installation
Conclusion: MKS 901P-11130-0167 has precise and durable measurement, and is a key monitoring spare part for vacuum chambers.
Product detailed pictures：
901P-11130-0167
product video
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