Zygo 8020-0237-01 Controller Module
Product Manual：
Zygo 8020-0237-01 is a ZMI-501A laser interferometry measurement control module, equipped with Zygo laser interferometer head, used for nanoscale displacement detection on semiconductor wafer platforms.
1. Adapt to ZMI7705 series laser measuring head to achieve interference displacement signal analysis
2. Ultra high nanometer level measurement resolution, positioning error controlled within the picometer range
3. Built in laser frequency stabilization closed-loop circuit, with minimal long-term measurement value drift
4. High speed real-time data sampling, no data loss on high-speed motion platform
5. Multi channel differential signal input to suppress cavity deformation common mode interference
6. Integrated real-time filtering algorithm to filter electromagnetic clutter noise in the workshop
7. Dedicated SRIO high-speed bus, low latency upload measurement data to industrial control
8. Multi channel status indicator light, visually displaying laser, communication, and fault status
9. 24V DC standard industrial power supply, suitable for machine voltage fluctuation environment
10. Multiple electrostatic and overvoltage protection to protect the internal precision optoelectronic chips
11. Metal shell porous heat dissipation, 24-hour continuous full load without heating up
12. Standard DB interface directly connected to laser probe, simple wiring and alignment
13. Built in fault self diagnosis, quickly identifying abnormalities in optical and circuit paths
14. Compact box structure, small machine cabinet space easy to install and fix
15. Equipped with Zygo dedicated metrology software, supporting data collection and calibration
The Zygo 8020-0237-01 controller module has top-notch measurement accuracy and stable signals, and is a core component for high-precision displacement measurement in lithography and detection equipment.
Product detailed pictures：
8020-0237-01
product video
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