MKS GS53-F05F07-HT vacuum pump actuator assembly
Product Manual：
MKS GS53-F05F07-HT vacuum pump actuator assembly
MKS GS53-F05F07-HT is a high-temperature pneumatic ball valve actuator assembly for semiconductor vacuum pipelines, suitable for AMAT wafer processing machines, and controls the on/off of vacuum pump pipelines
1. Single acting spring reset fork pneumatic structure, automatically shuts off vacuum pipeline upon loss of air
2. F05/F07 universal flange interface, combined with KF stainless steel vacuum ball valve for integrated assembly
3. HT high-temperature sealing material, resistant to high temperature working conditions, suitable for heating chamber environment
4. Aluminum alloy anodized cylinder body, lightweight and corrosion-resistant, suitable for dust-free workshops
5. PTFE+fluororubber double-layer seal, resistant to various semiconductor corrosion process gases
6. Standard 90 ° angle, ± 5 ° adjustable travel, precise switch positioning without leakage
7. Equipped with valve position feedback indicator, visually identify the fully open/fully closed status of the valve
8. Integrated signal wiring terminal, capable of transmitting valve position switch signals to the main control of the machine
9. Suitable for 5.6-8.4bar standard clean instrument air source, stable driving without jamming
10. Independent spring reset module, automatically cuts off vacuum in case of fault, ensuring safety
11. Metal shielding shell, resistant to cavity RF interference, avoiding misoperation
12. Non volatile clean processing technology meets the cleanliness level requirements of wafer production rooms
13. Integrated installation bracket, easy disassembly and fixation of vacuum pipeline
14. Seismic reinforcement transmission structure ensures that the machine is not easily stuck during long-term vibrations
15. Compliant with CE industrial safety standards, suitable for etching and thin film deposition vacuum systems
In summary, the MKS GS53-F05F07-HT high-temperature pneumatic actuator assembly has strong sealing, high temperature resistance, and corrosion resistance, and is the core supporting component for flow cutoff in semiconductor vacuum pump pipelines
Product detailed pictures：
product video
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