AMAT 0100-00516 Chamber Interlocking Board
Product Manual：
AMAT 0100-00516 Chamber Interlock Board controls semiconductor chamber safety signals, with reliable logic and the following characteristics:
1. AMAT 0100-00516 standard plug-in card structure, easy to disassemble and replace
2. Multi channel synchronous acquisition of chamber door, pressure, temperature safety signals
3. Rapid response to abnormal signals, immediate triggering of shutdown protection chamber
4. Multiple electrical protections, equipped with overcurrent, short-circuit, and anti burn circuits
5. Built in signal filtering to resist electromagnetic interference in clean workshops
6. Gold plated contacts are not easily oxidized during long-term use and have stable signal transmission
7. Independent safety logic circuit, independent of the main control to ensure effective protection
8. Onboard status indicator light, quickly identify interlocking fault points
9. Anti static coating, less likely to penetrate the onboard chip during handling and assembly
10. Compatible with AMAT etching and deposition series process chamber equipment
11. Wide voltage adaptation, interlocking does not fail under voltage fluctuation conditions
12. Moisture proof and dust-proof board, meeting the long-term operation requirements of dust-free workshops
13. Multi valve and gas path linkage control to avoid process safety hazards
14. Modular circuit layout, easy maintenance and troubleshooting of circuits in the later stage
15. Continuous 24-hour stable operation with low failure rate of industrial components
ending
AMAT 0100-00516 chamber interlock board has reliable safety protection and is the core safety control board for semiconductor process chambers.
Product detailed pictures：
0100-00516
product video
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