Jeol RF-MNIF3000 Matching Network Controller  

Product Manual：

1. Jeol RF-MNIF3000 matching network controller automatically calibrates RF line impedance
2. Real time monitoring of reflected power to reduce RF energy loss
3. Automatically adjust internal components to quickly complete line adaptation
4. Rack fixed installation, easy disassembly and debugging operation
5. The work generates stable heat and can operate continuously for a long time
6. Coordinated operation with electron microscope RF working unit
7. Good seismic performance, equipment vibration will not disrupt the matching state
8. Docking with the main control system of the whole machine, synchronous start stop does not require separate debugging

9. Switch between different working modes and adapt to various process conditions
10. Optimize the matching effect of RF power supply for semiconductor etching equipment
11. Circuit partition separation, strong and weak RF signals do not interfere with each other
12. Can work stably 24/7 in a regular computer room environment
13. Internally sealed to prevent dust and prevent parts from jamming due to dust
14. Automatic protection in case of power abnormality to avoid hardware damage
15. The Jeol RF-MNIF3000 matching network controller has passed factory debugging and can be put into use after installation
The Jeol RF-MNIF3000 matching network controller efficiently completes RF impedance matching, with comprehensive protection and stable operation.

Product detailed pictures：

RF-MNIF3000

product video

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