Edwards STP-iXR1606C Turbomolecular Pump  

Product Manual：

Edwards STP-iXR1606C Turbomolecular Pump
1. Field emission electron microscope chamber maintains ultra-high vacuum
2. Stable extraction of residual gases using surface composition analysis instruments
3. Quickly evacuate the wafer lock chamber to the required vacuum level for the process
4. Thin film growth chamber isolates external air impurities
5. Ion beam processing equipment creates a clean negative pressure environment
6. New material observation chamber maintains stable air pressure for a long time
7. Core pumping power components of high-precision helium detection equipment
8. On site replacement, commissioning and operation of old and identical pump bodies
9. Adapt to the extraction of slightly corrosive process exhaust gas

10. Installation verification speed, vacuum degree, and operating noise
11. Magnetic levitation structure has minimal vibration and does not affect precision testing
12. Can operate continuously and stably under load for a long time
13. Equipped with monitoring function to view real-time temperature and speed status
14. Daily inspection of heat dissipation and wiring, low frequency of disassembly and maintenance
15. Semiconductor sample detection chamber matched with vacuum extraction
The Edwards STP-iXR1606C turbo molecular pump is suitable for building high vacuum environments in precision detection instruments and semiconductor processes. It can replace faulty pump bodies and is easy to maintain in daily operations.

Product detailed pictures：

STP-iXR1606C

product video

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