Nikon KT002155-03 Controller Module

Product Manual：

#Nikon KT002155-03 Controller Module

1. Internal auxiliary axis motion logic control of lithography machine
2. Precise scheduling of wafer loading and unloading robotic arm movements
3. Valve and gas path timing linkage control in the cavity
4. Drive and control work of optical auxiliary correction components
5. Equipment safety interlock signal acquisition and judgment processing
6. Fine tuning of parameters corresponding to environmental temperature and humidity offset
7. Data reception and simple operation for alignment assisted detection
8. Control of small actuators inside the clean chamber
9. Complete machine communication relay signal transmission, reception, sorting and processing

10. Real time collection and control of monitoring data for cooling water channels
11. Start stop timing control of auxiliary components for light sources
12. Closed loop control of workpiece pre positioning auxiliary mechanism
13. Fault warning signal analysis and reporting output
14. Receiving and executing interactive instructions for production line docking
15. This Nikon KT002155-03 controller module is a sub control unit for lithography machines, which shares the control tasks of subsystems and reduces the load on the main control
In summary, Nikon KT002155-03 runs stably and anti-interference, with precise timing control, ensuring the stable operation of the supporting auxiliary mechanisms of the lithography machine.

Product detailed pictures：

KT002155-03

product video

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