TEL E280-000062-13 Controller MC Rack

Product Manual：

#TEL E280-000062-13 Controller MC Rack

1. TEL Etching Equipment ECC2 Main Control Machine Bearing Installation Base
2. Integrate CPCI bus backplane and plug in the main control computing board
3. RF, pneumatic, and vacuum control cards are centrally mounted
4. Fixed installation carrier for internal communication switch module of the machine
5. Unified and orderly layout support for device I/O signal acquisition board
6. Driver communication adapter board card slot fixation and bus interconnection
7. Process parameter calculation single board computer installation and fixation

8. Integrated installation of protective housing for the power distribution module of the whole machine
9. Centralized assembly and fixation of chamber valve timing control board
10. Regular installation of various fault monitoring and acquisition boards
11. On the production line, the communication adapter board of the lower computer is loaded with card positions
12. Overall layout support of servo motion control sub board
13. Installation of temperature, humidity, and pressure sensing signal processing board
14. The whole machine’s circuit is well-organized and shielded to reduce electromagnetic interference in the workshop
15. This TEL E280-000062-13 is a compact CPCI industrial rack that supports the entire set of main control hardware and enables high-speed bus communication of the board
In summary, TEL E280-000062-13 has a stable structure and regular wiring, ensuring the long-term stable operation of the main control system of the semiconductor etching equipment.

Product detailed pictures：

E280-000062-13

product video

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