CTI Kryogenics 8185071G001R Low Temperature Pump
Product Manual：
CTI Cryogenics 8185071G001R Low Temperature Pump
1. Closed loop helium refrigeration achieves ultra-high vacuum environment
2. High pumping rate and strong adsorption capacity for various gases
3. Built in microprocessor with built-in status diagnosis function
4. Support rapid regeneration and shorten downtime for maintenance
5. Low vibration, suitable for semiconductor process equipment
6. Integrated communication interface, supporting remote monitoring of pump status
7. Two stage cold head structure, high and low temperature division for gas adsorption
8. Can automatically complete the regeneration process, easy to operate
9. Flange standard, convenient installation of cavity docking
10. Oil free vacuum output to avoid oil contamination of the chamber
11. Support multi pump networking and synchronous regeneration operations
12. Equipped with temperature monitoring, real-time monitoring of cold head operating conditions
13. Industrial grade structure, capable of long-term continuous operation
14. Compatible with helium compressor, simple pipeline connection
15. Fault alarm output, convenient for early maintenance and prediction
CTI Cryogenics 8185071G001R low-temperature pump, commonly used in semiconductor coating vacuum chambers, has high cleanliness and stable vacuum performance.
Product detailed pictures：
8185071G001R
product video
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