Edwards 3620-00219 Dry Vacuum Pump   

Product Manual：

Edwards 3620-00219 Dry Vacuum Pump
1. Oil free dry structure, outputting clean vacuum
2. High extraction flow rate to meet the extraction requirements of the process chamber
3. Multi stage screw pump body, excellent vacuum performance
4. Built in air-cooled design, capable of continuous long-term operation
5. Equipped with multiple protection mechanisms against overload and overheating
6. Small vibration amplitude, reducing overall disturbance of the machine
7. Support the treatment of corrosive gas resistance in the process
8. Equipped with status monitoring and real-time feedback of operating parameters

9. Alarm signal output, abnormal can be uploaded to the control system
10. Support communication interface for remote monitoring of pump status
11. Long maintenance cycle, reducing downtime maintenance frequency
12. Compact body, saving equipment installation space
13. Pump body anti-corrosion treatment, suitable for semiconductor process exhaust gas
14. Fault self checking function, quickly locate the problem point
15. Easy disassembly and assembly, simple replacement of spare parts operation
Edwards 3620-00219 dry vacuum pump is used for vacuuming semiconductor etching and coating equipment, with no oil pollution and suitable for various process gas conditions.

Product detailed pictures：

3620-00219

product video

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