SMC 778-241422-001 Temperature Controlled Chiller
Product Manual：
SMC 778-241422-001 Temperature Controlled Chiller
1. Precision circulating temperature controlled chiller for semiconductor machines
2. Temperature closed-loop control, high temperature control accuracy, and suppression of process thermal drift
3. Suitable for various cooling circulation media such as ultrapure water and ethylene glycol
4. Built in variable frequency pump set, flow and pressure can be dynamically adjusted
5. Reliable pipeline sealing, multiple leakage monitoring and protection
6. Air cooled cooling structure, suitable for enclosed installation environment of cabinets
7. Real time collection of inlet and outlet liquid temperatures, feedback on process heat load
8. Equipped with multiple safety protections against overheating, low pressure, and abnormal liquid level
9. Support communication interface, connect with the machine main control to transmit the running status back
10. Alarm signal output, can be connected to the whole machine safety interlock circuit
11. Program storage function, quick switching and calling of multiple sets of temperature control parameters
12. Clean treatment of internal flow channels to meet the dust-free requirements of semiconductors
13. Good anti vibration performance, suitable for continuous production of equipment 24/7
14. The filter is easy to disassemble and assemble, reducing the difficulty of daily maintenance
15. Standardized pipelines and electrical interfaces, convenient replacement of spare parts
SMC 778-241422-001 temperature controlled chiller, a thermal management unit for semiconductor equipment, provides constant circulating cooling for heating components such as chambers and RF power supplies, ensuring stable process temperature.
Product detailed pictures：
778-241422-001
product video
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