AMAT 0190-38030 Vacuum Dry Pump  

Product Manual：

AMAT 0190-38030 Vacuum Dry Pump
1. Applied to the front-end dry vacuum pump of semiconductor equipment for application materials
2. Oil free chamber structure to avoid oil vapor pollution of the process chamber
3. The pump body is corrosion-resistant and can handle corrosive process gases generated by etching
4. Stable pumping speed, fast completion of cavity vacuuming operation
5. Built in air-cooled heat dissipation, supporting continuous production for 7 × 24 hours
6. Integrated multiple safety protections against overcurrent, overheating, and overload
7. Real time collection of rotational speed, temperature, and load operating parameters
8. Communication interfaces are complete, and the main control of the docking machine sends back the status

9. Alarm signal output, connected to the whole machine safety interlock circuit
10. Vibration reduction optimization, reducing disturbance to precision components of the machine
11. Anti dust deposition, reducing internal byproduct accumulation faults
12. The pump unit is modularized, making on-site disassembly and maintenance more convenient
13. Compact body, saving installation space at the bottom of the device
14. Fault log storage for easy operation and maintenance troubleshooting and traceability
15. Original factory specifications, good compatibility with spare parts replacement
AMAT 0190-38030 vacuum dry pump is a front-end pumping unit for semiconductor process equipment, providing clean negative pressure to ensure stable operation of wafer processes.

Product detailed pictures：

0190-38030

product video

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