Kashiyama MU100U-148 Dry Vacuum Pump
Product Manual：
Kashiyama MU100U-148 Dry Vacuum Pump
1. Multi stage Roots dry structure, oil-free output, clean rough vacuum
2. Stable pumping speed, used as a front-end pump for molecular pumps
3. Water cooling and heat dissipation, supporting 24-hour continuous operation of the production line
4. Configure nitrogen purging interface to suppress process gas corrosion and scaling
5. Low vibration level, reducing disturbance to precision machinery
6. Built in anti backflow valve to prevent reverse contamination of the chamber during shutdown
7. Three phase industrial power supply, compatible with semiconductor equipment power supply specifications
8. Compact overall structure, saving installation space inside the equipment
9. Built in intake filter to block particles from entering the pump chamber
10. Support remote communication to monitor pump operation status and alarms
11. The cavity is corrosion-resistant and suitable for slightly corrosive process gases in certain areas
12. Standardization of flange interface facilitates pipeline docking and assembly
13. Fault self diagnosis function, outputting fault codes for easy maintenance
14. Modular components, convenient disassembly and maintenance of on-site spare parts
15. Adapt to etching PVD、 Ion implantation vacuum unit
Kashiyama MU100U-148 dry vacuum pump, Kashiyama industrial dry pump, provides stable and reliable pre stage vacuum conditions for molecular pump units
Product detailed pictures：
MU100U-148
product video
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