TEL CX80-001452-V5 satellite system rack
Product Manual：
TEL CX80-001452-V5 is a satellite system main control rack specifically designed for semiconductor equipment at Tokyo Electronics (TEL). It supports multi module collaboration and is responsible for power supply, communication, control, and signal routing of equipment cavities/subsystems. It is commonly used in etching, deposition, and other process equipment.
core parameters
Model: CX80-001452-V5
Brand: TEL (Tokyo Electron)
Type: Satellite System Chassis
Structure: Standard 19 inch rack, 6U height, sheet metal reinforcement
Slot position: Multiple slots (≥ 12), supporting hot swappable modules
Power supply: DC 24V/48V redundant power supply, overvoltage/overcurrent protection
Communication: High speed backplane bus+Ethernet, low latency interaction between modules
Heat dissipation: front and rear air ducts+redundant fans, constant temperature and speed control
Environment: -10 ℃~+50 ℃, dustproof, moisture-proof, and vibration resistant
Adaptation: TEL Exelan/Unity series etching machines, CVD equipment
Main features (15 points)
Semiconductor specific rack, compatible with TEL high-end process equipment
6U standard rack, compatible with 19 inch industrial cabinets
Multi slot modularization, supporting mixed insertion of control/power/communication cards
Backplane high-speed interconnection, high data throughput and low latency
Redundant power supply design, automatic switching between primary and backup, anti power failure
Hot swappable support, online module replacement, non-stop maintenance
Intelligent heat dissipation, redundant fans+temperature control and speed regulation, noise reduction and energy saving
Industrial grade reinforcement, sheet metal thickening+coating, anti vibration and anti EMI
Comprehensive status monitoring, LED+remote alarm, fault visualization
Centralized signal routing simplifies the wiring between the cavity and the main control
Wide temperature stable operation, suitable for clean room conditions
Original factory precision matching, module plug and play, strong compatibility
Long life design, 10 years+service life, low failure rate
Remote diagnostic interface, supporting upper computer monitoring and parameter configuration
Reliable production line verification, batch application in TEL’s global factories
Product detailed pictures：
CX80-001452-V5
product video
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