TEL CX80-001452-V5 satellite system rack
Руководство по продукту：
TEL CX80-001452-V5 is a satellite system main control rack specifically designed for semiconductor equipment at Tokyo Electronics (ТЕЛ.). It supports multi module collaboration and is responsible for power supply, коммуникация, контроль, and signal routing of equipment cavities/subsystems. It is commonly used in etching, deposition, and other process equipment.
основные параметры
Модель: CX80-001452-V5
Brand: ТЕЛ. (Tokyo Electron)
Тип: Satellite System Chassis
Structure: Стандартный 19 дюймовая стойка, 6U height, sheet metal reinforcement
Slot position: Multiple slots (≥ 12), supporting hot swappable modules
Источник питания: DC 24V/48V redundant power supply, overvoltage/overcurrent protection
Коммуникация: High speed backplane bus+Ethernet, low latency interaction between modules
Heat dissipation: front and rear air ducts+redundant fans, constant temperature and speed control
Среда: -10 ℃~+50 ℃, пыленепроницаемый, влагостойкий, и виброустойчивый
Приспособление: TEL Exelan/Unity series etching machines, CVD equipment
Основные особенности (15 points)
Semiconductor specific rack, compatible with TEL high-end process equipment
6U standard rack, совместим с 19 inch industrial cabinets
Multi slot modularization, supporting mixed insertion of control/power/communication cards
Backplane high-speed interconnection, high data throughput and low latency
Redundant power supply design, automatic switching between primary and backup, anti power failure
Поддержка горячей замены, online module replacement, круглосуточное техническое обслуживание
Intelligent heat dissipation, redundant fans+temperature control and speed regulation, noise reduction and energy saving
Industrial grade reinforcement, sheet metal thickening+coating, anti vibration and anti EMI
Comprehensive status monitoring, LED+remote alarm, fault visualization
Centralized signal routing simplifies the wiring between the cavity and the main control
Широкий диапазон температур и стабильная работа, suitable for clean room conditions
Original factory precision matching, module plug and play, сильная совместимость
Дизайн с длительным сроком службы, 10 years+service life, низкий процент отказов
Remote diagnostic interface, supporting upper computer monitoring and parameter configuration
Reliable production line verification, batch application in TEL’s global factories
Подробные фотографии продукта：
CX80-001452-V5
видео о продукте
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