BROOKS ESC-204T-S293 Device Controller
Product Manual：
1、 Basic Information
Manufacturer: Brooks Automation
Model: ESC-204T-S293 (Rev 4.0 mainstream)
Type: 4-axis servo robot controller (ESC=Electronic Smart Controller)
Adaptation equipment: Brooks ATR8 atmospheric single arm robot, wafer pre aligner, EFEM transmission unit
Core scenarios: Semiconductor 200/300mm wafer fabs, FPD panel fabs Load Port/EFEM、 Vacuum/atmospheric transmission line
Status: The original factory has ceased production, and the market is mainly dominated by refurbished/second-hand products, with a unit price of approximately $7950
2、 Electrical and Performance Parameters
Input power supply: AC 100-120V/200-240V ± 10%, 50/60Hz
Number of control axes: 4 axes (servo motor+external axis)
Servo drive: Built in Galil motion control card, pulse control, supports encoder feedback
Positioning accuracy: ± 0.02mm (cleanroom high-precision)
Communication interface: RS-232 (host/teach pendant), I/O terminal, Ethernet (optional)
Output power: 24VDC (vacuum valve/solenoid valve), PWM servo motor power
Cooling method: Air cooling (dustproof filter, suitable for Class 100 cleanroom)
Dimensions: Approximately 480 × 520 × 180mm
Weight: Approximately 18kg
Working environment: Temperature range of 10-40 ℃; Humidity 20% -80% RH (no condensation); Cleanliness Class 100
3、 Hardware structure (modular)
Main control board: Galil DMC-2140 (4-axis motion control core)
Servo drive board: ESC-204T-DRV (4-axis servo amplifier)
Power module: 24VDC/10A, ± 15VDC, 5VDC multi output
I/O board: ESC-204T-IO (16 in/16 out, optically isolated)
Operation panel: LED status display (power/operation/alarm), supports handheld teaching pendant (MCP)
Chassis: 19 inch rack mounted, fully sealed dust-proof, EMI shielded
Product detailed pictures：
ESC-204T-S293
product video
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