SCHUMACHER VG600NI evaporator

Product Manual：

SCHUMACHER VG600NI evaporator product features
Introduction: SCHUMACHER VG600NI is a specialized vaporization evaporator for semiconductor processes, with precise temperature control and stable steam output, suitable for continuous operation in thin film deposition production lines.
Wide range precise temperature control, small temperature adjustment error
Uniform vaporization of liquid source, uniform and stable vapor concentration
Built in multiple safety protections for overheating, low pressure, and leakage
Corrosion resistant chamber material, suitable for various special chemical reagents
Equipped with an LCD operation panel, parameter settings are intuitive and simple

Modular compact body, cabinet installation saves space
Standard industrial communication interface, compatible with the entire PLC system
Real time flow monitoring, automatic compensation for steam output
Sealed and leak proof pipeline structure reduces material loss
Power on automatic self check, quickly identify equipment faults
Low temperature stable start-up, no local overheating or boiling problems
Compatible with multiple semiconductor thin film and etching process equipment
Constant temperature insulation design, the pipeline is not prone to condensation and accumulation of liquid
Anti clean room with slight vibration, stable operating conditions
Can store multiple sets of process formulas, easy to switch processes
Conclusion: SCHUMACHER VG600NI has high safety and simple operation and maintenance, and is a core supporting equipment for semiconductor gas-phase processes.

Product detailed pictures：

VG600NI

product video

Other links

 PPC905AE101 3BHE014070R0101 3BHE014071P201控制器
 UFC921A101 3BHE024855R0101 3BHE024856P201控制器
 SB822 3BSE018172R1控制器模块

Other links

8225-FKM-PVDF-55T-C Digital Conductivity Transmitter
GXD-Q18P Circuit Breaker
EC5525PPAP sensor