NIKON X155Y10002-A Precision Optical Components
Product Manual：
NIKON X155Y10002-A Precision Optical Components
Introduction: NIKON X155Y10002-A is an original precision optical accessory for Nikon lithography machines. It has stable optical path imaging, ensures wafer overlay and exposure accuracy, and is suitable for long-term operation of dust-free lithography production lines.
Ultra high precision optical lens assembly with minimal imaging distortion and excellent resolution
Multi layer professional coating, anti reflection, reduces light energy loss
Sealed dustproof tube structure, suitable for dust-free working conditions in clean workshops
Precision mechanical positioning structure with extremely low repeated alignment error
Resistant to constant temperature and vacuum environment, with strict control of thermal deformation
Equipped with dedicated signal sensors for real-time monitoring of optical path offset
Built in multiple temperature compensations to eliminate accuracy drift caused by temperature differences
Metal anti-corrosion shell, resistant to trace chemical volatilization corrosion
Standard installation positioning hole, easy disassembly and calibration steps
Optoelectronic isolation sensing circuit, shielding RF electromagnetic interference
Equipped with a light path abnormality indicator, quickly troubleshoot light path faults
Compatible with Nikon’s mainstream NSR series scanning/stepper lithography machines
Compact size, suitable for installation in narrow optical chambers of equipment
Original precision machining, stable long-term continuous working performance
Support whole machine bus communication and data synchronization to the main control system
Conclusion: NIKON X155Y10002-A has high optical accuracy and strong durability, making it a key replacement spare part for lithography exposure imaging systems.
Product detailed pictures：
X155Y10002-A
product video
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