LAM 853-143791-912 Spectrometer  

Product Manual：

LAM 853-143791-912 Spectrometer
Introduction: LAM 853-143791-912 is a plasma detection spectrometer equipped with a Panlin etching machine, used for real-time monitoring of the plasma state in the cavity.
Built in xenon lamp light source, wide spectral acquisition range
High resolution grating, precise recognition of weak light signals
High speed CCD detector with fast detection response speed
Real time collection of plasma characteristic spectra to determine process endpoint
Metal sealed body, suitable for clean vacuum chamber environment
Integrated heat dissipation hole design, no temperature rise during long-term operation
Multi class industrial communication interfaces, directly connected to the main control system of the equipment
Built in signal noise reduction circuit, resistant to workshop electromagnetic interference

Equipped with self inspection of the light path, automatic warning of light source faults
Standard fiber optic interface, easy disassembly and wiring of optical path
The whole machine is miniaturized, and the installation space of the cabinet is small
7 × 24-hour continuous stable operation, suitable for mass production lines
Complete spectral data storage for easy process traceability analysis
Multiple hardware protections to prevent damage from overvoltage and optical path overload
Same series LAM equipment is universal and can be replaced directly on site
Conclusion: LAM 853-143791-912 has precise detection and strong adaptability, and is a core optical detection spare part for semiconductor etching equipment.

Product detailed pictures：

853-143791-912

product video

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