ЛАМ 853-143791-912 Spectrometer

Руководство по продукту：

ЛАМ 853-143791-912 Spectrometer
Введение: ЛАМ 853-143791-912 is a plasma detection spectrometer equipped with a Panlin etching machine, used for real-time monitoring of the plasma state in the cavity.
Built in xenon lamp light source, wide spectral acquisition range
High resolution grating, precise recognition of weak light signals
High speed CCD detector with fast detection response speed
Real time collection of plasma characteristic spectra to determine process endpoint
Металлический герметичный корпус, suitable for clean vacuum chamber environment
Integrated heat dissipation hole design, no temperature rise during long-term operation
Multi class industrial communication interfaces, directly connected to the main control system of the equipment
Built in signal noise reduction circuit, устойчив к электромагнитным помехам мастерской

Equipped with self inspection of the light path, automatic warning of light source faults
Standard fiber optic interface, easy disassembly and wiring of optical path
The whole machine is miniaturized, and the installation space of the cabinet is small
7 × 24-hour continuous stable operation, suitable for mass production lines
Complete spectral data storage for easy process traceability analysis
Multiple hardware protections to prevent damage from overvoltage and optical path overload
Same series LAM equipment is universal and can be replaced directly on site
Заключение: ЛАМ 853-143791-912 has precise detection and strong adaptability, and is a core optical detection spare part for semiconductor etching equipment.

Подробные фотографии продукта：

853-143791-912

видео о продукте

Другие ссылки

Плата аналогового ввода DSAI133A 3BSE018290R1
PU519 3BSE018681R1控制器
PM891 3BSE053240R1DCS控制器

Другие ссылки

Delta Tau ACC51E 4096 Analog Encoder
DELTA TAU ACC-68E Control Board
Schneider BMXNOM0200 Port Module