3D80-00006-V1 pneumatic slit valve  

Product Manual：

3D80-00006-V1 pneumatic slit valve
Introduction: 3D80-00006-V1 semiconductor vacuum equipment pneumatic slit valve, controls the vacuum on/off of the chamber.
Pneumatic drive, smooth switch action without jamming
Excellent sealing performance, maintaining the vacuum degree of the cavity
Narrow slit structure, suitable for small machine spaces
Anti corrosion sealing components, suitable for dust-free process environments
Equipped with position feedback, providing real-time feedback on valve status
Convenient air pressure regulation, controllable opening and closing force
The metal body is sturdy, wear-resistant, and has a long service life
Dustproof and particle proof, non polluting vacuum chamber
Easy disassembly and assembly, time-saving and effortless daily maintenance

Suitable for semiconductor coating and etching vacuum pipelines
Can operate continuously for 24 hours without interruption in mass production for a long time
Standard gas interface, no need to modify pipelines
Easy to troubleshoot, valve position abnormalities can be quickly identified
Seismic resistant structure, stable operation under machine vibration
Modular structure, easy and fast replacement of spare parts
Conclusion: 3D80-00006-V1 has good sealing and stable operation, and is a spare part for vacuum process core valves.

Product detailed pictures：

3D80-000006-V1

product video

Other links

NAI 64SD1-08KRF1-13控制模块
 216EA62 1MRB150083R1F 1MRB178066R1F控制模块
 216DB61 HESG324063R100J控制系统

Other links

531X307LTBAJG1 A combustion engine card
531X305NTBAPG1 F31X305NTBAPG1 MRP375547 Gas turbine module
DS200DCFBG1BNC Gas turbine module