3D80-00006-V1 pneumatic slit valve

Руководство по продукту：

3D80-00006-V1 pneumatic slit valve
Введение: 3D80-00006-V1 semiconductor vacuum equipment pneumatic slit valve, controls the vacuum on/off of the chamber.
Pneumatic drive, smooth switch action without jamming
Excellent sealing performance, maintaining the vacuum degree of the cavity
Narrow slit structure, suitable for small machine spaces
Anti corrosion sealing components, suitable for dust-free process environments
Equipped with position feedback, providing real-time feedback on valve status
Convenient air pressure regulation, controllable opening and closing force
The metal body is sturdy, wear-resistant, and has a long service life
Dustproof and particle proof, non polluting vacuum chamber
Easy disassembly and assembly, time-saving and effortless daily maintenance

Suitable for semiconductor coating and etching vacuum pipelines
Can operate continuously for 24 hours without interruption in mass production for a long time
Standard gas interface, no need to modify pipelines
Easy to troubleshoot, valve position abnormalities can be quickly identified
Seismic resistant structure, stable operation under machine vibration
Модульная структура, easy and fast replacement of spare parts
Заключение: 3D80-00006-V1 has good sealing and stable operation, and is a spare part for vacuum process core valves.

Подробные фотографии продукта：

3D80-000006-V1

видео о продукте

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